IBAD plasmas

J. M. López-Ludeña, F. J. Gordillo-Vázquez, M. Fernández, J. M. Albella, D. Cáceres and I. Vergara

     "Investigation of TiC thin films synthesised by low energy IBAD from electron evaporation of TiC powder”

Applied Surface Science, 172, p. 110-116, 2001

 

J. M. López-Ludeña, F. J. Gordillo-Vázquez , M. Fernández and J. M. Albella

     "Influence of oxygen on the morphological and mechanical properties of Ti films by IBAD”

Thin Solid Films, 384 (1), p. 69-75, 2001

 

J. M. López-Ludeña, F. J. Gordillo-Vázquez , O. Böhme and J. M. Albella

     "Low grain size TiN thin films obtained by low energy ion beam assisted deposition techniques"

Applied Surface Science, 173, p. 290-295, 2001