Hydrocarbon plasmas

M. Camero, F. J. Gordillo-Vázquez, J. Ortiz and C. Gómez-Aleixandre

     "Influence of the power on the processes controlling the formation of ECR-CVD carbon-nitride films from CH4/Ar/N2 plasmas ”

Plasma Sources Science & Technology, 13 (1), p. 121-126, 2004

F. J. Gordillo-Vázquez and J. M. Albella

     " Influence of the pressure and power on the non-equilibrium plasma chemistry of C2, C2H, C2H2, CH3 and CH4 affecting the synthesis of nanodiamond thin films from C2H2 (1 %)/H2/Ar-rich plasmas ”

Plasma Sources Science & Technology, 13 (1), p. 50-57, 2004

F. J. Gordillo-Vázquez and J. M. Albella

     "Distinct non equilibrium plasma chemistry of C2 affecting the synthesis of nanodiamond thin films from C2H2(1 %)/H2/Ar-rich plasmas ”

2003 issue of the Virtual Journal of Nanoscale Science & Technology

J. M. López-Ludeña, F. J. Gordillo-Vázquez and J. M. Albella

     "Nanocrystalline diamond thin films deposited by 35 KHz Ar-rich plasmas ”

Applied Surface Science, 185, p. 321-325, 2002

F. J. Gordillo-Vázquez and J. M. Albella

     "A quasianalytic kinetic model for C2H2(1 %)/H2/Ar RF plasmas of interest in nanocrystalline diamond growth ”

Plasma Sources Science & Technology, 11 (4), p. 498-512, 2002

F. J. Gordillo-Vázquez , C. Gómez-Aleixandre and J. M. Albella

     "Influence of the excitation frequency on CH4/H/H2 plasmas for diamond film deposition: Electron energy distribution function and atomic hydrogen concentration ”

Plasma Sources Science & Technology, 10 (1), p. 99-116, 2001